High-power operation of an argon excimer laser with a MgF/sub 2/ and SiC cavity

Abstract

An intense coherent light pulse whose energy, height and width (FWHM) were 80 mJ, 16 MW, and 5 ns, respectively, was obtained as 126 nm from an argon excimer laser. A superpoished SiC mirror was used in combination with a MgF/sub 2/ output coupler for an electron-beam-pumped argon excimer laser. The SiC mirror had a reflectivity at 126 nm as high as 47% and was highly damage resistant. Laser mirror materials for high-power short-wavelength lasers are discussed. Surface damage on the MgF/sub 2/ output mirror could not be avoided; this prevented stable operation of the argon excimer laser. In order to obtain such high power from the argon excimer laser, it is necessary to construct the resonator without a MgF/sub 2/ coupler. An unstable resonator is considered as the best candidate for the stable operation of the argon excimer laser.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>