Abstract

Mechanisms involved in laser processing of ion implanted semiconductors have been extensively investigated (1,2). Relatively little work has been done on implanted metals (3,10). The liquid solid interface (melt front) velocity in metals (11,12) is much larger than that in Si. Therefore several nonequilibrium effects on recrystallization (6) solute segregation (9) and metastable phase formation (4,6,7) are observed. Such effects would depend on the melt front velocity, equilibrium phase diagram considerations (such as equilibrium segregation coefficient Ko, miscibility in licuid phase, intermediate phases etc.) and also on the as implanted nonequilibrium phase and defect structure. In this paper we present a study of the influence of some of these parameters during laser treatment of sincle crystals of virgin Al and dilute implanted alloys of Mo and Cd in Al.

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