Abstract

高出力な両面駆動形積層静電モータを開発した. 従来研究におけるフィルム形静電モータの移動子・固定子フィルムは, それぞれの表面同士を対向させた場合にのみ推力を得ることが可能であったが, 本研究では裏面でも推力を生成可能なフィルムを新たに設計・試作し, その有用性を確認した. 試作したフィルムを積層した静電モータの推力は駆動電圧1.4kV0-p印加時に約3.5Wの出力を生成し, 効率は最大約46%を得た.

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