Abstract
Microwave discharges for excitation of CO2 laser have been investigated. A resonant microwavecavity (2.45 GHz) has been employed to get high power laser operation. Laser experimentsusing a system composed of fast axial gas flow and axial electric field parrallel to the laserbeam have been performed. Both electric field distribution and resonant frequency of thecavity calculated by using the SUPERFISH were compared with the results of the measurements.Homogeneous discharges caused by the resonance of TM010 mode was obtained usingcylindrical cavity with reentrant type tuners on the both end plates. The laser output of 259 Wand the efficiency of 14% were obtained from a newly developed two-cavity CO2 laser module.
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