Abstract
We report the demonstration of waveguided germanium-on-silicon-on-insulator metal-semiconductor-metal (MSM) photodetectors with novel silicon-carbon (Si:C) Schottky barrier enhancement layer. Significant suppression of dark current (/dark) by ~4 orders of magnitude was achieved over a conventional MSM photodetector due to an enhanced hole Schottky barrier height of 0.52 eV. At an applied bias V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">A</sub> of 1.0 V a -3-dB bandwidth of ~12 GHz at an incident wavelength of 1550 nm was demonstrated. Optical measurements performed at photon wavelengths lambda of 1520-1570 nm reveal a uniform spectral response and quantum efficiency of ~760 mA/W and ~60%, respectively, demonstrating an effective photodetection for the entire C-band spectrum range.
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