Abstract
A high-sensitive torsional silicon accelerometer for automotive air bags systems has been developed using the wet etching of a single crystal silicon and silicon–glass bonding technique. The fabricated accelerometer yields a sensitivity of 100 mV/G, and a nonlinearity of 1.13% over a range of −22 G to 22 G. The minimum detectable acceleration measured by readout electronics is 25 mG.
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