High-performance one-stage detector for SiC crystal defects based on convolutional neural network

Abstract

SiC (silicon carbide), as the most important third-generation semiconductor material, has huge market prospects in numerous fields, such as 5G base stations and new energy vehicle charging piles. The identification of SiC crystal defects is essential for improving crystal quality. Currently, this study relies mainly on artificial methods to identify defects, which have significant limitations in terms of accuracy and efficiency. Thus, to quickly detect and classify different SiC crystal defects in complex scenarios, a convolutional neural network-based SiC crystal defect detection (SCDD-Net) model is presented for the first time in this study. SCDD-Net uses an improved online convolutional re-parameterization method that can effectively extract the features of SiC crystal defects and decrease the large training overhead. We devised a new spatial pyramid pooling module that, when combined with the global context block, enables the fast fusion of high-level crystal defects and underlying features. We also designed an anchor-based decoupling detection head network to identify smaller crystal defects. By collecting and processing more than 5300 high-quality microscopic images, we built a fine-grained labeled SiC crystal defect image dataset, SiC-Crystal-5K, for the first time. The experimental results show that the SCDD-Net has excellent detection accuracy compared to other state-of-the-art models. The mean average precision for high-resolution SiC crystal defect identification reached 99.53%, corresponding to a single-image detection speed of 102 fps. In addition to crystal-defect detection, the SCDD-Net model can be used as a general-purpose detector in a wide range of scenarios.