Abstract
This paper reports on the first demonstration of an ultra-fast (thermal time constant of 1.4 ms) and low detection limit (Noise Equivalent Power, NEP of 2.4 nW/Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> ) Nano-Electro-Mechanical Systems (NEMS) resonant infrared (IR) detector based on an aluminum nitride (AlN) nano-plate resonator (NPR). A Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> thin film (100 nm thick) long wavelength IR absorber (LWIR of 8-14 μm) was integrated with an ultra-thin AlN (250 nm thick) NPR working at a higher order lateral-extensional mode (resonance frequency of 196.6 MHz), resulting in a high electromechanical performance (quality factor Q = 1062 and electromechanical coupling coefficient k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> = 1.62%), NEMS resonant structure with unique IR detection capabilities.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
