Abstract
Micromechanical tunable VCSELs with dramatically improved performance are demonstrated using AlAs oxidation. Larger aperture (~10 µm) devices achieve record tuning of 19.1 nm with 3.3 mA threshold currents. Smaller aperture (~5 µm) devices achieve record threshold currents of 460 µA, and output powers of 0.9 mW with 7 nm of tuning.
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