High performance microheater-based catalytic hydrogen sensors fabricated on porous anodic alumina substrates

Abstract

Catalytic combustion-type gas sensors are widely used in industry and everyday life for detecting flammable gases. However, high power consumption is one of the main drawbacks of the catalytic sensors. Replacing the platinum wire heating element with a thin-film microheater can significantly reduce power consumption, but maintaining high sensitivity and long-term stability of such devices is a challenge. Here we developed microheater-type catalytic hydrogen sensors based on porous anodic aluminium oxide served simultaneously as a substrate for platinum microheater and as a carrier for a catalyst. The fabricated sensors have a high sensitivity of 76 mV/vol% hydrogen. The deviation of the sensor response during continuous operation for 14 days is less than 4%. The relative humidity of the ambient atmosphere does not affect the sensor response. The fast sensor response time (0.4 s) makes it possible to use the pulsed power supply mode to reduce the power consumption to 3.2 mW without sacrificing the measurement accuracy. The performance of the developed catalytic hydrogen sensors promotes the high competitiveness in the market and the prospects for industrial applications.