Abstract

Piezoelectret (also known as ferroelectret) is a kind of cellular electret material with strong piezoelectric effect. Such a material exhibits flexibility, low density and small acoustic impedance. Therefore, piezoelectret is an ideal material for air-borne flexible sound transducers. Aiming at high-sensitivity and thermal-stability sound transducers, in this work, laminated fluorinated polyethylene propylene (FEP) and polytetrafluoroethylene (PTFE) piezoelectret film with a regular cellular microstructure is prepared by a procedure involving template-based cellular structure formation and polarization. The results show that the characteristic acoustic impedance of such a laminated FEP/PTFE film is 0.02 MRayl. The quasi-static piezoelectric charge coefficient <i>d</i><sub>33</sub> up to 800 pC/N is achieved in a small applied pressure range. The maximum value of sensitivity of the microphones based on laminated FEP/PTFE piezoelectrets film can reach to 6.4 mV/Pa at 1 kHz. Besides, the frequency response curve of the device is flat in the whole audio range. For an ultrasonic transmitter with a diameter of 20 mm, driven by a voltage of 600 V (<i>V</i><sub>p</sub>), the sound pressure level (SPL) generated by it increases from 80 to 90 dB (Ref. 20 µPA) as frequency increases from 40 to 80 kHz. The thermal stability of the sensitivity for the transducers made of such a laminated FEP/PTFE piezoelectret film is much superior to that of polypropylene (PP) piezoelectret based device. The sensitivity of the present device remains 26% of the initial value after being annealed at 125 ℃ for 211 h. The improvement of thermal stability is attributed to the excellent space charge storage stability of FEP and PTFE.

Highlights

  • The results show that the characteristic acoustic impedance of such a laminated fluorinated polyethylene propylene (FEP)/PTFE film is 0.02 MRayl

  • 基于 fluorinated polyethylene propylene (FEP)/PTFE 复合膜压电驻极 体的麦克风的灵敏度高达 6.4 mV/Pa@1 kHz, 远 高于文献中报道的基于单层压电驻极体麦克风的 灵敏度, 且器件在整个声频范围内的响应曲线平 坦

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Summary

Introduction

研究 结果表明, FEP/PTFE 膜的特性声阻抗为 0.02 MRayl (1 Rayl = 10 Pa·s/m); 在小压强范围内的准静态压电 电荷系数 d33 可高达 800 pC/N, 且具有良好的压强特性. 基于 FEP/PTFE 复合膜压电驻极体的麦克风的灵敏 度最高可达 6.4 mV/Pa@1 kHz, 远高于文献报道的相同结构的压电驻极体麦克风的灵敏度, 且具有平坦的频 响曲线. FEP/PTFE 复合膜压电驻极体的 制备主要由如图 1 所示的 2 个步骤完成 [29,30], 即微 孔结构膜的制备和微孔膜的极化. 图 1 有序结构 FEP/PTFE 复合膜压电驻极体的制备工艺 Fig. 1. Preparation process of laminated FEP/PTFE piezoelectret film.

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