High performance InP ring resonator for new generation monolithically integrated optical gyroscopes

Caterina Ciminelli,Francesco Dell'Olio,Francisco M Soares,Mario N Armenise,Wolfgang Passenberg

doi:10.1364/oe.21.000556

Abstract

An InP ring resonator with an experimentally demonstrated quality factor (Q) of the order of 10(6) is reported for the first time. This Q value, typical for low loss technologies such as silica-on-silicon, is a record for the InP technology and improves the state-of-the-art of about one order of magnitude. The cavity has been designed aiming at the Q-factor maximization while keeping the resonance depth of about 8 dB. The device was fabricated using metal-organic vapour-phase-epitaxy, photolithography and reactive ion etching. It has been optically characterized and all its performance parameters have been estimated. InP waveguide loss low as 0.45 dB/cm has been measured, leading to a potential shot noise limited resolution of 10 °/h for a new angular velocity sensor.

Highlights

Optoelectronic gyroscopes available on the market, i.e. ring laser gyro (RLG) and fiber optic gyro (FOG), are well established sensors widely utilized in the field of inertial navigation of civil and military vehicles, including satellites, airplanes, and helicopters [1]
To effectively respond to this increasing market demand, integrated optoelectronic angular velocity sensors are emerging as a promising alternative to the RLG and the FOG [2]
In this paper we report on design, fabrication and optical characterization of an InGaAsP/InP ring resonator with Q equal to 0.97 x 106

Summary

Introduction

Optoelectronic gyroscopes available on the market, i.e. ring laser gyro (RLG) and fiber optic gyro (FOG), are well established sensors widely utilized in the field of inertial navigation of civil and military vehicles, including satellites, airplanes, and helicopters [1]. They have outstanding performance (resolution < 0.1 °/h), those rotation sensing systems are too bulky and power consuming for some emerging applications demanding low-power and reliable miniaturized gyros. The device we propose in this paper is about 30% more performing than the resonator we described in Ref [24]

Resonator configuration and design criteria

Resonator fabrication

Gyro resolution

Findings

Conclusions