Abstract
Flexible pressure sensors have shown great potential for applications in detection and medical fields due to their unique piezoelectricity and high sensitivity. In this paper, micro-nano-perforated structures with different periods and diameters are fabricated on the polyester (PET) films by femtosecond laser direct writing (FsLDW), and then the perforated structures are embossed on polyvinylidene fluoride (PVDF) films to form sensors with circular truncated cone (CTC) structures. The effect of period and diameter on the sensitivity of the sensor is studied numerically and experimentally. The results show that the high sensitivity of 8.98 mV/KPa can be achieved in a PVDF film pressure sensor with a period of 50 μm and a diameter of 30 μm, which is about 10.9 times that of the structureless sensor. This work not only provide a fast fabricated method for the pressure sensor based on the femtosecond laser and hot embossing, but also has potential applications in the detection of the micro-signals.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
