Abstract
The objective of this work is to process a high performance flat miniature heat pipes (FMHP). The FMHP is fabricated by ultra-deep LIGA (UD-LIGA) process developed by SRRC. Moreover, the performance of the FMHP is theoretically estimated. The dimensions of microgrooves on the FMHP are 1 mm in depth, 100 μm in width, and 60 mm in length. The theoretically predicted results show that the dissipated heat flux can reach to 391 W at a working temperature of 100 °C.
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