Abstract
The application of solid-state quantum emitters in real-world quantum information technologies requires precise nanofabrication platforms with high process yield. Self-assembled semiconductor quantum dots with excellent emission properties have proven to be among the best candidates to meet the needs of a number of novel quantum photonic devices. However, their spatial and spectral positions vary statistically on a scale that is far too large for their system integration via fixed lithography and inflexible processing schemes. We solve this severe problem by introducing a flexible and deterministic manufacturing scheme based on precise and convenient cathodoluminescence spectroscopy followed by high-resolution electron-beam lithography. The basics and application examples of this advanced in situ electron-beam lithography are described in this article. Although we focus here on quantum dots as photon emitters, this nanotechnology concept is very well suited for the fabrication of a variety of quantum nanophotonic devices based on quantum emitters that exhibit suitably strong cathodoluminescence signals.
Highlights
Cathodoluminescence (CL) spectroscopy has a long standing tradition as powerful spectroscopy approach with high spatial resolution and high excitation energy [1]
We focus here on quantum dots as photon emitters, this nanotechnology concept is very well suited for the fabrication of a variety of quantum nanophotonic devices based on quantum emitters that exhibit suitably strong cathodoluminescence signals
In [77] we report on the deterministic integration of InGaAs quantum dots (QDs) in GaAs slabs that are waferbonded onto SiN/SiO layers beforehand
Summary
The application of solid-state quantum emitters in real-world quantum information technologies licence. Any further distribution of this work must maintain quantum dots with excellent emission properties have proven to be among the best candidates to meet attribution to the the needs of a number of novel quantum photonic devices. Their spatial and spectral author(s) and the title of the work, journal citation positions vary statistically on a scale that is far too large for their system integration via fixed and DOI. We solve this severe problem by introducing a flexible and deterministic manufacturing scheme based on precise and convenient cathodoluminescence spectroscopy followed by high-resolution electron-beam lithography. We focus here on quantum dots as photon emitters, this nanotechnology concept is very well suited for the fabrication of a variety of quantum nanophotonic devices based on quantum emitters that exhibit suitably strong cathodoluminescence signals
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