High-performance copper mesh for optically transparent electromagnetic interference shielding

Abstract

A wide-spectrum high-transmittance copper mesh was designed and fabricated for effective shielding of electromagnetic waves. Using mask lithography and chemical etching, the copper mesh can be easily fabricated. The thickness of the copper mesh is uniform, whether at the crossing section and the copper wire. The average transmittance of the copper mesh from ultraviolet band to near-infrared band (200–2500 nm) is 96%, in agreement with the designed results. The electromagnetic interference shielding efficiency (EMI SE) is to 16 dB in Ku-band. The result of X-ray photoelectron spectroscopy analysis shows that a large amount of Cu2+ on the surface is reduced to Cu0 and Cu+ after annealing. As result, the EMI SE value of copper mesh has increased by 1.5 dB in Ku-band. We envision that the copper mesh can provide a good solution for optically transparent electromagnetic interference shielding.