Abstract

We developed high performance cold cathode electron beam fabrication technique with carbon nanotube(CNT) emitters. Properties of CNT emitters and its electron emission characteristics should be compatible with application devices. Xray tubes require very high current with small cathode area and ultraviolet lamps require uniform electron emission on large area. So, we developed novel CNT electron beam with buffer and metal layer for sacrificing for structural rigidity and enhanced conductivity. We applied the novel CNT cold cathode electron beam for UV lamps and x-ray tubes for high performance UV light and x-ray image.

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