Abstract
We present a dual-channel resonance acoustic sensor based on a poly (vinylidene fluoride-co-trifluoroethylene) piezo-electric membrane which combines the Fabry-Pérot interference and piezoelectric effects. The deformation of circular thin films is indicated by interference and piezoelectric effects at the same time, and the noise level was decreased by real-time convolution of the two-way parallel signal. Studies reveal that at the film’s resonance frequency, the minimum detection limits for Fabry-Pérot interference and the piezoelectric impact on acoustic waves are 2.61 μPa/Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> and 15.64 μPa/Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> , respectively. The result of the convolution shows that the background noise has been reduced by 98.81% in relation to the piezoelectric signal and by 96.73% in relation to the Fabry-Pérot interference signal, respectively. The signal-to-noise ratio of the convolution is several times greater than the other two signals at 2 mPa.
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