High order diffraction grating using v-shaped groove with refractive and reflective surfaces

Abstract

This paper presents a noble diffractive grating so as to achieve high diffraction order. A v-shaped groove transmission grating with reflective and refractive surfaces (VGRRS) is proposed. Design, fabrication, and optical testing of the VGRRS are described. This grating is simulated by Rigorous coupled-Wave analysis (RCWA) for TE mode and fabricated by thermal evaporation on the replica which is obtained through a hot-embossing process using a v-shaped groove mold. The most important property of VGRRS is to conduct a high diffraction order at visible wavelengths. When used at the wavelength of 406 nm, the VGRRS can strongly have two high diffracted lights in terms of -4th and -10th transmission diffraction orders.