Abstract
Simulation techniques are developed for high-numerical-aperture (NA) polarized microscopy with Babinet's principle, including partial coherence and vector diffraction for non-periodic geometries. The model includes vector illumination and diffraction in high-NA (up to NA=3.5) object space that is imaged into low-NA image space and recorded on an image sensor. A mathematical model for the Babinet approach is developed and interpreted that includes partial coherence using expanded mutual intensity, where object reflective characteristics modify the coherence functions. Simulation results of the Babinet's principle approach are compared with those of rigorous coupled wave theory (RCWT) for periodic structures to investigate the accuracy of this approach and its limitations.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
