Abstract

High resolution topographic imaging of carbon based samples have been problematic primarily due to the low secondary electron-I yield from specimens of low atomic mass. Both cold cathode and Schottky field emission (SFE) in-lens SEMs produce small beam diameters (5-10 Å) and achieve their highest resolution when operated at high (20-30 keV) accelerating voltages. The Topcon in-lens SFE-SEM/STEM has been in service at Emory U. for four years, and has generated quality images of carbon based materials and biological membranes. Enrichment of the SE-I signal from hydrocarbon based specimens was achieved by the application of a 1 run thick, fine grain Cr film and provided images of 1-2 nm particulate features without decoration or enlargement. Specimen beam interaction and the resultant particle contrast in a high magnification analog image recording was compared for graphitic carbon, diamond, and chromium coated polyvinylstyrene and fenestrated endothelial cell membranes (FECM).Chemical vapor deposition (CVD) was used to deposit various forms of carbon on Si (111) wafers.

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