High humidity and high vacuum environment performance of MoS2/Sn composite film

Abstract

In order to improve the service performance of key mechanical parts in high humidity and high vacuum environments, the MoS2/Sn composite films with different Sn contents were prepared by magnetron sputtering technique. The morphology, composition and structure of the as-deposited films were investigated by SPM, SEM, XRD and XPS. The mechanical and tribological properties of MoS2/Sn composite films in different humidity and vacuum environments were investigated. The results show that Sn-doping changes the crystal structure of MoS2, increases the hardness and elastic modulus, and reduces the oxidation activity of the MoS2 films. Especially, the MoS2/Sn composite film with optimized Sn content of 7.2 at.% has better tribological properties compared with pure MoS2 films in a high humidity of 75% RH and high vacuum environments.