Abstract
Significant progress in high repetition rate ultrashort pulse sources based on fiber technology is presented. These systems enable operation at a high repetition rate of up to 500 kHz and high average power in the extreme ultraviolet wavelength range via high harmonic generation in a gas jet. High average power few-cycle pulses of a fiber amplifier pumped optical parametric chirped pulse amplifier are used to produce µW level average power for the strongest harmonic at 42.9 nm at a repetition rate of 96 kHz.
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