High gap sputtered DLC layers

Abstract

Adherent and transparent unhydrogenated DLC layers were deposited by means of r.f. and d.c. magnetron sputtering at low deposition temperatures. The optical gap value increases from 0.7 to 2.2 eV when deposition pressure is increased from 10 −2 to 10 −1 Torr. In high gap materials, large amounts of sp 3 hybridized carbon atoms are present. When Al contacts are evaporated in coplanar configuration on these high gap materials, rectifying and photoelectrical effects are observed.