High-frequency surface waves at a plasma-metal interface: II. Dispersion of a nonlinear wave

Abstract

A study is made of the dispersion properties of nonlinear surface waves propagating along a plasma-metal interface under conditions corresponding to the formation of a space charge sheath that equalizes the electron and ion fluxes to the wall. Oscillations of the plasma boundary under the action of the surface wave field are taken into account. It is shown that these oscillations are the main nonlinear mechanism for generating wave field harmonics and are analogous to the nonlinearity in the current-voltage characteristic of the space charge sheath. The effect of the nonlinearity on the dispersion properties of surface waves due to the relationship between the sheath thickness and wave amplitude is calculated with allowance for harmonic generation. The energy transported by surface waves under conditions typical of RF and microwave discharges is calculated.