Abstract
Surface Acoustic Wave (SAW) resonators with high resonant frequency (in the GHz range) are described. In this work Interdigital Transducers (IDTs) of the SAW resonator are scaled down to 150nm. The resonant frequency of a SAW resonators is mainly limited by the width of IDTs and types of piezoelectric materials used. Hence, hundreds nanometer size of IDTs will increase the frequency up to several Gigahertz (GHz), which will improve the sensitivity to detect a small load mass change in real time and shows a promising potential for sensing fields.
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