Abstract
The high frequency magnetic properties of CoFe/SiO/sub 2/ multilayer film, which has magnetic anisotropy induced by the inverse magnetostrictive effect, are examined with a view to applying it as a low loss soft magnetic material in the MHz-GHz range. The inverse magnetostrictive effect was used to produce a large uniaxial anisotropy field of 200-250 Oe. A CoFe magnetic layer, with a large saturation magnetization of 24.5 kG and a magnetostriction of +10/sup /spl minus/4/, was selected, and patterned in strips to produce an anisotropic film stress of /spl minus/10/sup 9/ dyn/cm/sup 2/. A relative permeability of 40 and a cut-off frequency of about 7 GHz were achieved in CoFe/SiO/sub 2/ (50/100 nm) film, and these values agree well with values obtained by calculation and from static magnetic properties.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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