Abstract

To increase safety and reduce the electric circuit cost, dielectric elastomer actuators (DEAs) must operate below the kV range. The simplest strategy to reduce the voltage operation is to decrease the dielectric elastomer membrane thickness. This research aims to demonstrate DEAs with a nanometric uniform thickness that can operate at a low voltage (below 70 V) and a high frequency. We use the roll-to-roll process to fabricate a 600 nm thick stretchable PDMS (polydimethylsiloxane) nanosheet and a 200 nm thick conductive nanosheet. These nanosheet-DEAs are tested in high-frequency operations of DC voltage below 70 V and in a frequency range of 1–30 kHz.

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