Abstract

The miniaturization of machine components is perceived by many as a core requirement for the future technological development of a broad spectrum of products. One of the challenges in micro engineering is the development of economical micro systems that are flexible, functional and made of appropriate engineering materials. The mechanical removal of materials using miniature tools, known as a micro machining process, has unique advantages in creating 3D components using a variety of engineering materials, when compared with photolithographic processes. Since the diameter of miniature tools is very small, excessive forces and vibrations will significantly affect the overall part and tool quality. In order to improve the part and tool quality, accurate measurement of micro cutting forces is imperative. In this paper, we focus on the development of an ultra precision micro milling system and the measurement of micro cutting forces using a three-axis miniature force sensor and accelerometers. Since the inherent dynamics of the workpiece and overall machine tool affects the frequency bandwidth, we employ the Kalman filter approach to fuse the sensor signals and compensate for unwanted dynamics, in order to increase the bandwidth of the force measurement system. Based on accurate cutting force measurement, we can come up with the optimal process parameters to maintain desired tolerances and also monitor the process to prevent failures.

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