Abstract
This paper reports on the demonstration of ultrafast (thermal time constant, τ ∼ 166 μs) and high resolution (noise equivalent power, NEP ∼ 549 pW/Hz1/2) thermal detectors based on high quality factor 50-nm thick aluminum nitride (AlN) piezoelectric resonant nanoplates. Here we show that by employing nanoscale (30 nm) aluminum anchors, both high thermal resistance (Rth ∼ 1.1 × 106 K/W) and high quality factor (Q ∼ 1000) can be achieved in greatly scaled AlN nanoplate resonators. Furthermore, the absorptance of such ultrathin AlN resonators was characterized, in mid-wavelength infrared region showing an average absorptance of ∼36% from 2.75 μm to 6.25 μm. These unique features were exploited for the experimental demonstration of AlN NEMS resonant thermal detectors with greatly reduced thermal capacitance and over doubled figure of merit [FoM = 1/(NEP × τ)] compared to what was previously achieved by the same technology.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.