High Fidelity Surface Chemical Imaging at 1000 nm Levels: Internal Reflection IR Imaging (IRIRI) Approach

Abstract

This report presents how combination of internal reflection (IR) and infrared imaging (IRI) can reach a surface spatial resolution at 1000 nm levels in the middle infrared range. As a result, vibrational spectra from these size areas can be recorded at high signal-to-noise levels. A spatial calibration of this method was performed by correlating IRIRI data with SEM micrographs and optical images of geometrically well-defined polymeric photoresists as well as Nylon fibers imbedded into a polyester matrix. The IRIRI approach has the potential of obtaining even better surface spatial resolution of vibrational spectra when internal reflection elements with greater refractive index ratios in the middle IR range become available.