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Abstract
Optical and structural changes of sapphire(0001) substrates implanted with Ti ions or with Ti and 0 ions and subjected to thermal annealing, are examined by optical absorption, RBS-channeling and XRD measurements. The transmittance of the co-implanted sample was larger than that of the Ti-implanted sample. After annealing at 1000 °C, rutile-type TiO 2 microcrystals with (200) orientation were formed in the co-implanted sample of Ti and O ions. Furthermore, a broad optical absorption at 220–340 nm in the co-implanted sample was increased after the annealing. This was possibly due to the formation of TiO2 microcrystals in the sapphire substrate. In contrast to this result, no evidence of the formation of titanium oxide in a crystal structure was obtained for the Ti-implanted sample after the annealing.
Published Version
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