Abstract
A high-efficiency X-ray microfocusing device covering a 7–30 keV energy range has been developed and tested at the ESRF BM5 beamline. It is composed of a mirror mounted on a 2-moments flexural hinge based bender and coated with 2 laterally-graded multilayers and a single-layer of iridium. With a demagnification factor of 128, focal spot sizes down to 1 μm were obtained using an on-line shaping procedure having a sub-μrad precision.
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