Abstract
We have investigated the absorption spectra of silicon-on-insulator (SOI) photodiode with Au thin film which is corrugated by SiO2 line-and-space structure. It is aimed for the high-efficiency of SOI absorption by surface plasmon resonance. The structural parameters such as SiO2 thickness, period of corrugation, and the duty-ratio were optimized by FDTD simulation.
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