Abstract
Potassium dihydrogen phosphate (KDP) is a type of nonlinear optical crystal material. To Inhibit the transverse stimulated Raman scattering of laser beam and then enhance the optical performance of the optics, the edges of the large-sized KDP crystal needs to be removed to form chamfered faces with high surface quality (RMS<5 nm). However, as the depth of cut (DOC) of fly cutting is usually several, its machining efficiency is too low to be accepted for chamfering of the KDP crystal as the amount of materials to be removed is in the order of millimeter. This paper proposes a novel hybrid machining method, which combines precision grinding with fly cutting, for crackless and high efficiency chamfer of KDP crystal. A specialized machine tool, which adopts aerostatic bearing linear slide and aerostatic bearing spindle, was developed for chamfer of the KDP crystal. The aerostatic bearing linear slide consists of an aerostatic bearing guide with linearity of 0.1 μm/100mm and a linear motor to achieve linear feeding with high precision and high dynamic performance. The vertical spindle consists of an aerostatic bearing spindle with the rotation accuracy (axial) of 0.05 microns and Fork type flexible connection precision driving mechanism. The machining experiment on flying and grinding was carried out, the optimize machining parameters was gained by a series of experiment. Surface roughness of 2.4 nm has been obtained. The machining efficiency can be improved by six times using the combined method to produce the same machined surface quality.
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