Abstract
We developed a high-speed and high-efficiency narrow-width metal-oxide-semiconductor (MOS) capacitor-type Si optical modulator (Si-MOD) by applying TM optical mode excitation. We designed and fabricated an optical-mode-converter structure from TE to TM mode. Even in the case of a 200-nm width, the Si MOS-MOD showed high-modulation efficiency in TM mode (about 0.18 Vcm), and the electrical capacitance decreased as the MOS junction width decreased. We also demonstrated high-speed operation at 32 Gbps and 40 Gbps for the 30-µm-long Si MOS-MOD in TM mode.
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