Abstract
Piezoelectric actuators have been utilized in piezoelectric speakers. In this study, in order to develop a piezoelectric actuator capable of being used in piezoelectric speakers, Pb(Mn1/3Nb2/3)0.07(Ni1/3Nb2/3)0.10(Zr0.5Ti0.5)0.83O3 composition ceramics were fabricated by the conventional mixed oxide method. The effects of ZnO and Nb2O5 on their microstructure and piezoelectric properties were systematically investigated. The tetragonality has been increased in the ceramics with the increase of the Nb2O5 addition. When Nb2O5 content and sintering temperatures were 0.2 wt%, 940 °C, respectively, the excellent physical properties of d33 = 386 pC/N, er = 1667, kp = 0.661, Qm = 1285 and FOM = 935 103 were obtained for low loss piezoelectric actuator application.
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