Abstract
A new approach to the development of extraction systems capable of forming ion beams with previously inaccessible intensity is proposed. The use of inhomogeneous accelerating field allows to improve the ion beam formation efficiency significantly. The increase of electric field magnitude is achieved by changing the shape of the electrodes only, without increasing the accelerating voltage and decreasing the interelectrode distance. The comparison is made between a new extraction system and a flat traditional one, which is the most common. The use of a new electrode geometry allows to increase the lifetime of the electrodes in sources of intense beams operating in a continuous wave mode. For electron cyclotron resonance ion sources, results demonstrate the possibility to form high-quality ion beams with a current density of more than 1A cm−2.
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