Abstract
Experimental results show that the energies of ions produced near a hollow cathode orifice can be several times the anode-to-cathode potential difference generally considered available to accelerate them. These energies (of order 50 eV) are sufficient to induce substantial sputter erosion rates. Increases in discharge current (to 60 A) cause the energies and current densities of these jet ions to increase substantially. A model describing jet ion generation is proposed. The effects of discharge current on cathode internal pressure are also examined experimentally and described phenomenologically.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
