Abstract

This article describes the research effort to obtain a quality ion beam with high currents from the dense plasma of the pulsed electron cyclotron resonance discharge pumped with high-power millimeter-wave radiation. The results of the experiments aimed at optimization of the two-electrode system for ion extraction are presented. Under the conditions, when the density of the ion current in the vicinity of the plasma electrode was 65–75 mA/cm2, the normalized emittance of the ion beam did not exceed 0.19 π mm mrad.

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