Abstract

An InP optical 90° hybrid based on a × 4 MMI coupler with a deep ridged waveguide is designed and fabricated. The working principle of the 90° hybrid is systematically introduced. Three-dimensional beam ropagation method (3D BPM) is used to optimize the structure parameters of the 90° hybrid. The designed compact structure is demonatrated to have a low excess loss less than –0.15 dB, a high common mode rejection ratio better than 40 dB, and a low relative phase deviation less than ± 2.5°. The designed hybrid is manufactured on a sandwitched structure deposited on an InP substrate. The measured results show that the common mode rejection ratios are larger than 20 dB in a range from 1520 nm to 1580 nm. The phase deviations are less than ± 5 ° in a range from 1545 nm to 1560 nm and less than ± 7° across the C band. The designed 90° optical hybrid is suitable well for realizing miniaturization, high-properties, and high bandwidth of coherent receiver.

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