Abstract
Using standard microelectromechanical system (MEMS) processes to coat a microcantilever with a piezoelectric layer results in a versatile transducer with inherent self-sensing capabilities. For applications in multifrequency atomic force microscopy (MF-AFM), we illustrate that a single piezoelectric layer can be simultaneously used for multimode excitation and detection of the cantilever deflection. This is achieved by a charge sensor with a bandwidth of 10 MHz and dual feedthrough cancellation to recover the resonant modes that are heavily buried in feedthrough originating from the piezoelectric capacitance. The setup enables the omission of the commonly used piezoelectric stack actuator and optical beam deflection sensor, alleviating limitations due to distorted frequency responses and instrumentation cost, respectively. The proposed method benefits from a more than two orders of magnitude increase in deflection to strain sensitivity on the fifth eigenmode leading to a remarkable signal-to-noise ratio. Experimental results using bimodal AFM imaging on a two component polymer sample validate that the self-sensing scheme can therefore be used to provide both the feedback signal, for topography imaging on the fundamental mode, and phase imaging on the higher eigenmode.
Highlights
Emerging methods in multifrequency atomic force microscopy (MF-AFM) rely on the detection and excitation of higher order eigenmodes of a microcantilever [1,2,3] and as such, present a number of practical challenges to cantilever instrumentation
We demonstrate that the self-sensing method can be extended to MF-AFM techniques such as bimodal imaging by measuring the charge simultaneously at multiple higher eigenmodes
Experimental results using monomodal and bimodal atomic force microscopy with the first and fifth eigenmode of a piezoelectric cantilever on a variety of samples validate that the selfsensing scheme proposed in this work achieves remarkable signal-to-noise ratios and can be used to provide both the feedback signal for topography imaging on the fundamental mode and phase imaging on the higher eigenmode
Summary
Emerging methods in multifrequency atomic force microscopy (MF-AFM) rely on the detection and excitation of higher order eigenmodes of a microcantilever [1,2,3] and as such, present a number of practical challenges to cantilever instrumentation Both high-bandwidth cantilever actuation and deflection sensing are necessary, ideally without distorting the frequency response of the cantilever and involving a minimum amount of external equipment. Among the sensing techniques to detect the cantilever oscillations, the optical beam deflection (OBD) method [9] remains the most widely used approach mostly due to its low noise characteristics Its limitations such as frequent laser alignment, imaging artifacts due to optical interferences [10] and limited bandwidth requiring custom-built read-out electronics [11,12] have led to the development of numerous integrated sensing approaches. These include capacitive [13], piezoresistive [14], piezoelectric [15] and magnetoresistive [16] sensing
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