Abstract
A high average power of 140 mW and high conversion efficiency of 14% were demonstrated in “water window” soft X-rays generated using a laser plasma source developed in-house, when a solid Ar target was irradiated by a commercial Nd:YAG Q-switched laser with an energy of 1 J at a repetition rate of 1 Hz. This soft X-ray power compared favorably with that produced using a synchrotron radiation source, and the developed laser plasma source can be used in various applications, such as soft X-ray microscopy, in place of synchrotron facilities.
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