High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams.

Christian Vetter,Cyril Billet,Francois Courvoisier,Remo Giust,Luc Froehly,Luca Furfaro

doi:10.3390/ma14226749

Abstract

Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration.

Highlights

Cutting and drilling glass is an important technological problem, when the width over which the material has to be modified is much smaller than the length of the modification
Ultrafast laser processing is very attractive because the infrared wavelength and the very high intensity of the pulses enable energy deposition in three dimensions, including inside the bulk of glass [1]
We investigate the regimes in which various structures are produced using single shot Bessel beams depending on pulse energy, pulse duration, and position in the sample

Summary

Introduction

Cutting and drilling glass is an important technological problem, when the width over which the material has to be modified is much smaller than the length of the modification. When the focusing angle of the Bessel beam is sufficiently high, the conical flow of energy crosses the high-intensity region only in the central hotspot. This drastically reduces the influence of the Kerr effect, so that longitudinally-invariant structures can be processed within dielectrics [10,11,12]

Methods

Results

Conclusion