Abstract
Since the original observations by Duncumb in 1962, a number of studies have been conducted on the effects of electron channel on characteristic x-ray emission and microanalysis. Most of the recent studies have concentrated upon using the phenomenon to perform site specific distributions of impurity elements in ordered compounds using theALCHEMImethodology. Very few studies have attempted to accurately measure the effect as a function of orientation and compare these results to theory. In this study, two dimensional high angular resolution studies of channeling enhance x-ray emission were performed and herein the results are compared to theoretical calculations of Allen etal.All experimental measurements presented here were conducted on a PhilipsEM 420Tanalytical electron microscope. The instrument was operated in theTEMmode, at 120 kV using anLaB6electron source. The characteristic x-ray emission was measured using anEDAXultra thin window Si(Li) detector having aFWHMof ∼ 145 eV at Mn Kα.
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