Abstract

å ‰æŸæŒ‡å‘ç¨³å®šç³»ç»ŸåŸºäºŽå¯¹å ‰æŸä½ç½®å’Œè§’åº¦çš„æŽ§åˆ¶ï¼Œèƒ½å¤Ÿå®žçŽ°å¯¹å ‰æŸæŒ‡å‘çš„é«˜ç²¾åº¦ä¸»åŠ¨æŽ§åˆ¶ï¼Œåœ¨å¾®çº³å ‰åˆ»åŠè¶ åˆ†è¾¨æˆåƒç­‰é¢†åŸŸä¸­å‘æŒ¥ç€é‡è¦çš„ä½œç”¨ã€‚ä¸ºäº†å®žçŽ°å ‰æŸçš„é•¿æ—¶é—´æŒ‡å‘ç¨³å®šï¼Œæå‡ºä¸€ç§åˆ†ç¦»å¼è°ƒæŽ§çš„å°åž‹åŒ–å ‰æŸæŒ‡å‘ç¨³å®šç³»ç»Ÿï¼Œæ¶ˆé™¤äº†ä¼ ç»Ÿæ–¹æ¡ˆä¸­åŒåå°„é•œæ ¡æ­£å¸¦æ¥çš„è€¦åˆè¯¯å·®ï¼Œå¤§å¹ åº¦æå‡äº†å ‰æŸæŒ‡å‘ç²¾åº¦çš„æŽ§åˆ¶æ€§èƒ½ã€‚å¯¹æ¯”æµ‹è¯•ç»“æžœè¡¨æ˜Žï¼ŒåŸºäºŽè¯¥æ–¹æ³•çš„å ‰æŸæŒ‡å‘ç¨³å®šç³»ç»Ÿå¯¹å ‰æŸä½ç½®çš„ç¨³å®šç²¾åº¦ï¼ˆRMS值)可达0.3 μm,角度稳定精度(RMS值)达到1 μradï¼›æ–½åŠ ä¸€å®šå¹ åº¦çš„ä¸»åŠ¨æ‰°åŠ¨åŽçš„æµ‹è¯•ç»“æžœè¡¨æ˜Žï¼Œè¯¥ç³»ç»Ÿåœ¨è¾ƒå¤§çš„å ‰æºæŠ–åŠ¨ä¸‹ä»èƒ½ä¿æŒåŒä¸€é‡çº§çš„ç¨³å®šç²¾åº¦ã€‚ç›¸æ¯”äºŽåŒæ ·æµ‹è¯•æ¡ä»¶ä¸‹çš„ä¸¤ç§å•†ä¸šåŒ–å ‰æŸæŒ‡å‘ç¨³å®šç³»ç»Ÿï¼Œå ¶ä½ç½®æŠ–åŠ¨ä¸Žè§’åº¦æŠ–åŠ¨æ€§èƒ½å¯æé«˜50%以上。

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