Abstract
In order to realize ductile regime cutting of brittle materials, it is important to determine the initial contact between a tool and a workpiece with high accuracy. Thus the detection of initial contact in diamond turning of Al and Si was examined using an AE transducer. The sensitivity and the response speed of an AE signal were evaluated in comparison with those of an electric contact signal. Treatments to improve the conductivity of a diamond needle as a tool and a Si wafer as a workpiece were made in order to determine an electric signal representing the initial contact between a tool and a workpiece. The resistance of 65Ωwas obtained by spattering of a diamond needle using Ar ions. The resistance of a Si substrate was reduced to 300Ω by doping P ions into it. As a result, the detection of initial contact during cutting of a Si substrate was accomplished on the 1O nm level. Moreover, the sensitivity of detection using an AE transducer was found to depend on the impact energy ; thus, the sensitivity was improved with the cutting speed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
