Abstract

Hierarchical ZnO/CuO nanorods were grown on RF sputtered ZnO seed layer via the hydrothermal method and their characteristics are analyzed by high resolution scanning electron microscope (HRSEM) and X-ray diffraction (XRD) techniques to confirm the elemental composition, crystal structure, and morphology of the sensing material. The sensing performance of the carbon dioxide sensor was evaluated at room temperature under the various concentration of carbon dioxide gas from 150 ppm to 1000 ppm. The result obtained shows that the sensor yields a high response of 9.7 % for 1000 ppm of carbon dioxide gas with fast response and recovery time varied in the range of 1–4 min. The above results indicate the accomplishment of room temperature sensing with good reversibility and repeatability compared to conventional previously reported high temperature carbon dioxide sensors.

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