Abstract
Resistive Random Access Memory (RRAM) is considered one of the most promising candidates for big data storage. By using atomic layer deposition and magnetron sputtering, HfO2 thin films were prepared on ITO first, which exhibited good resistive switching (RS) characteristics in the structure of Ag/HfO2/ITO. By analyzing the RS mechanism, it is found that both metal conductive filaments and oxygen vacancy conductive filaments coexisted and Sn ion in ITO can influence the retention of RRAM. Furthermore, a device in the structure of Ag/HfO2/Pt was proposed and prepared, which exhibited excellent RS characteristics, including an ultrahigh switching ratio averaging up to 108 and low operating voltage. It is concluded that the difference in the work function between the top and bottom electrodes contributes to improving the switching ratio, reducing the operating voltage. In addition, the Ag/HfO2/Pt device is similar to the Ag/HfO2-based threshold switching selector in the structure and in characteristics of high switching ratio, besides non-volatile memory. Hence, the device is functionally equivalent to the combination of an RRAM and a threshold switching selector. It is the potential way to replace the conventional 1S1R structure memory.
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