Abstract
Aluminum nitride film is deposited on soda-lime glass by aerosol deposition method with helium carrier gas. The deposition rate becomes more than 10 times larger by the pre-processing of the primary powder with ball milling. By adding the heat treatment as the pre-processing, the deposition rate further increases. During the aerosol deposition some of the particles transform from wurtzite structure (hexagonal) to rock salt structure (cubic). With the ball milling as pre-processing, the peaks of rock salt structure in X-ray diffraction pattern are mostly higher than that of wurtzite structure. However with the ball milling and heat treatment as pre-processing, the peaks of wurtzite structure become higher. This means portion of rock salt structured crystallites becomes less by the pre-processing of heating.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
